Microlithography Using Metastable Helium Atoms: Patterning of Gold Film Coated with Dodecanethiol Self-Assembled Monolayers on Mica
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-30
著者
-
Kurahashi Mitsunori
National Institute for Materials Science
-
Yamauchi Yasushi
National Institute for Materials Science
-
Suzuki T
National Institute For Materials Science
-
JU Xin
National Institute for Materials Science
-
SUZUKI Taku
National Institute for Materials Science
関連論文
- 25pWX-9 Surface magnetism of rare-earth metal thin films
- 25pWX-9 Surface magnetism of rare-earth metal thin films
- Microlithography Using Metastable Helium Atoms: Patterning of Gold Film Coated with Dodecanethiol Self-Assembled Monolayers on Mica
- A Spin-Polarized Metastable-Atom Deexcitation Spectroscopy (SPMDS) Study on Surface Curie Temperature of Fe Films on Cu(100)
- Spin-Polarized Metastable Deexcitation Spectroscopy Study of Potassium and Oxygen Adsorbed Iron Surfaces
- Single Crystal Growth and Improvement of the Superconductivity in Nd_Pr_xBa_2Cu_3O_y System : Superconductors
- Development of Spin-Polarized Ion Scattering Spectroscopy
- 25pPSB-51 First-principles study on the spin polarization of CO-adsorbed Fe(110) surface
- Microlithography Using Metastable Helium Atoms: Patterning of Gold Film Coated with Dodecanethiol Self-Assembled Monolayers on Mica
- Effect of Impurity in Discharge Gas on High γ Properties of Newly Developed CeSrO Film for Novel Plasma Display Panel
- A Spin-Polarized Metastable-Atom Deexcitation Spectroscopy (SPMDS) Study on Surface Curie Temperature of Fe Films on Cu(100)
- Microfabrication of Silicon Using Self-Assembled Monolayer Resist and Metastable Helium Beam
- Spin Polarization Measurement of Metastable He $2^{3}S_{1}$ Atoms in He Discharge