Plasma Etching of TEM Samples for Observing Grain Boundaries in Silicon Nitride
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概要
- 論文の詳細を見る
- Published for the Japanese Society of Electron Microscopy by Oxford University Pressの論文
- 1995-06-01
著者
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Bando Y
Advanced Materials Laboratory And Nanomaterials Laboratory National Institute For Materials Science
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Bando Yoshio
National Institute Of Materials Science
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Suematsu Hisayuki
National Instutute For Research In Inorganic Materials
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MITOMO Mamoru
National Instutute for Research in Inorganic Materials
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Mitomo M
National Inst. Res. In Inorganic Materials Ibaraki Jpn
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Mitomo Mamoru
National Institute For Materials Research
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Bando Yoshio
National Institute For Materials Science Advanced Materials Laboratory
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Bando Yoshio
International Center For Materials Nanoarchitectonics National Institute For Materials Science (nims
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Bando Yoshio
Advanced Materials Laboratory And Nanomaterials Laboratory National Institute For Materials Science
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Bando Yoshio
Advanced Materials Laboratory National Institute For Materials Science
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