3次元配線アレイの開発

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概要

• 論文の詳細を見る

• We have proposed the concept of distributed micro motion systems (DMMS) composed of micro cell array. We focused on the multi-layered fabrication process to integrate such micro devices as actuators, sensors and circuits for implementation of a micro cell array. In this case, each devices are produced on a separate substrate and connected together after fabrication. This paper describes the 3 dimensional (3-D) wire array which have been developed for the interconnection between these substrates.

• 社団法人 電気学会の論文

著者

• GOTO Tomoaki

  Fuji Electric Device Tech., Co., Ltd.

• Matsushita Kouji

  Fuji Electric Co. Ltd.

• Goto Tomoaki

  Fuji Electric Advanced Technology Co. Ltd Production Technology Laboratory

• KONISHI Satoshi

  IIS, University of Tokyo

• FUJITA Hiroyuki

  IIS, University of Tokyo

• Konishi Satoshi

  Iis University Of Tokyo

• Goto Tomoaki

  Fuji Electric Co. Ltd.

• Fujita Hiroyuki

  Iis University Of Tokyo

• Fujita Hiroyuki

  IIS, The University of Tokyo

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