Reshaping of Single-Crystal Silicon Microstructures

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概要

• 論文の詳細を見る

• This paper deals with the reshaping technology for realizing three-dimensional (3-D) microstructures through plastic deformation of single-crystal silicon (SCS) films by applying Joule heating. SCS beams are used for determining the behavior of SCS microstructures during reshaping. The reshaped SCS structure has a sharp corner at a point where stress and heat are concentrated. The plastic deformation caused by flow stress results in permanent 3-D shapes.

• 社団法人応用物理学会の論文
• 1999-03-15

著者

• FUJITA Hiroyuki

  IIS, University of Tokyo

• Fujita Hiroyuki

  Iis The University Of Tokyo

• YANG Eui-Hyeok

  IIS, The University of Tokyo

• Yang Eui-hyeok

  Iis The University Of Tokyo

• Fujita Hiroyuki

  IIS, The University of Tokyo

関連論文

• 3次元配線アレイの開発
• Reshaping of Single-Crystal Silicon Microstructures
• A HIGH YIELD RELEASING TECHNIQUE BY USING A SILICON OXIDE DIAPHRAGM

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