Temperature-Corrected Quartz-Crystal Microbalance for Real-Time Film Thickness Monitoring in Vacuum Evaporation
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概要
- 論文の詳細を見る
For a quartz-crystal microbalance system without thermocouples for monitoring thin film thickness, a computational method which corrects for the temperature variation in the quartz crystal is presented. This correction method eliminates the need for pipes and electrical wires, simplifying the conventional system. To avoid the use of electrical wires, both a laser diode and a microlens were used to transmit the signal of the change of resonant frequency of the quartz crystal. Using a 4.2 MHz resonant AT-cut quartz-crystal plate, the error in the measurement of Ti film thickness was <3.0% under the conditions of deposition time <230 s and the quartz-crystal temperature <160° C.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1996-09-15
著者
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YAMAMOTO Hideki
Department of Surgery, Tama-Nagayama Hospital, Nippon Medical School
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SAIGA Noriaki
Department of Applied Physics, Faculty of Engineering, Osaka University
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Saiga Noriaki
Department Of Electronic Control Engineering Yonago National College Of Technology
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Saiga Noriaki
Department Of Applied Physics Faculty Of Engineering Osaka University
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Yamamoto Hideki
Department Of Electronic Control Engineering Yonago National College Of Technology
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Yamamoto Hideki
Deparment Of Toxicology Faculty Of Veterinary Medicine Hokkaido University
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