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Dept. of Micro System Engineering, Nagoya University | 論文
- Analysis of Structure & Material-Property Effects On a Thermal Type Fingerprint Sensor
- 特集論文 Anisotropy of Fracture Strength and Fracture Toughness of Micro-Sized Single-Crystal Silicon (特集:MEMS/NEMS材料特性および信頼性評価)
- B25-075 Characterization of MEMS Materials : Micro-Nano Physics Underlying MEMS
- OS6(1)-2(OS06W0033) Measurement of the Fracture Toughness of Micrometer Scale Single Crystal Silicon by Tensile Test Method
- Mobile Mechanism Suitable for Rough Terrain Vehicle