OS6(1)-2(OS06W0033) Measurement of the Fracture Toughness of Micrometer Scale Single Crystal Silicon by Tensile Test Method
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概要
- 論文の詳細を見る
- 一般社団法人日本機械学会の論文
- 2003-09-09
著者
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Shikida Mitsuhiro
Dept. Of Micro System Engineering Nagoya University
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SATO Kazuo
Dept. of Micro System Engineering, Nagoya University
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LI Xueping
Dept. of Micro-Nano Systems Engineering, Nagoya University
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NAKAO Shigeki
Dept. of Micro-Nano Systems Engineering, Nagoya University
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KASAI Takashi
Dept. of Micro-Nano Systems Engineering, Nagoya University
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Tanaka Hiroshi
Dept. of Micro System Engineering, Nagoya Univ.
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Ando Takeo
Dept. of Micro System Engineering, Nagoya Univ.
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Ando Taeko
Dept. Of Micro System Engineering Nagoya University
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Li Xueping
Dept. Of Micro System Engineering Nagoya Univ.
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Kasai Takashi
Dept. Of Micro System Engineering Nagoya Univ.
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Nakao Shigeki
Dept. Of Micro System Engineering Nagoya Univ.
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Sato Kazuo
Dept. Of Micro System Engineering Nagoya University
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Tanaka Hiroshi
Dept. Of Mechanical Engineering Kobe Univ.
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