Analysis of Structure & Material-Property Effects On a Thermal Type Fingerprint Sensor
スポンサーリンク
概要
- 論文の詳細を見る
- 2000-02-28
著者
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Shikida Mitsuhiro
Dept. Of Micro System Engineering Nagoya University
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Han Ji-song
Dept. Of Micro System Engineering Nagoya University
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KADOWAKI Tadashi
Dept. of Micro System Engineering, Nagoya University
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SATO Kazuo
Dept. of Micro System Engineering, Nagoya University
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Sato Kazuo
Dept. Of Micro System Engineering Nagoya University
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Kadowaki Tadashi
Dept. Of Micro System Engineering Nagoya University
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SHIKIDA Mitsuhiro
Dept. of Micro System Engineering, Nagoya University
関連論文
- Analysis of Structure & Material-Property Effects On a Thermal Type Fingerprint Sensor
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- B25-075 Characterization of MEMS Materials : Micro-Nano Physics Underlying MEMS
- OS6(1)-2(OS06W0033) Measurement of the Fracture Toughness of Micrometer Scale Single Crystal Silicon by Tensile Test Method