特集論文 Anisotropy of Fracture Strength and Fracture Toughness of Micro-Sized Single-Crystal Silicon (特集:MEMS/NEMS材料特性および信頼性評価)

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概要

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• This paper presents the dependence of fracture toughness, fracture strength, and fracture behavior, such as crack propagation, on the crystal orientation of single-crystal silicon. We conducted on-chip tensile testing to measure fracture strength and fracture toughness of single-crystal silicon films with (100) and (110) surface in the <100> and <110> loading direction. The loading direction had a significant effect on fracture toughness, which was 2.17MPa√m in the <100> direction and 1.27MPa√m in <110>. However, the fracture strength varies with both loading direction and surface orientation. We observed a fracture specimen on which a (111) cleavage plane eventually appeared on any crystal types of the specimen.

• 社団法人 電気学会の論文
• 2005-07-01

著者

• Shikida Mitsuhiro

  Dept. Of Micro System Engineering Nagoya University

• Shikida Mitsuhiro

  Ecotopia Science Institute Nagoya University

• SATO Kazuo

  Dept. of Micro System Engineering, Nagoya University

• ANDO Taeko

  Dept. of Micro-Nano Systems Engineering, Nagoya University

• LI Xueping

  Dept. of Micro-Nano Systems Engineering, Nagoya University

• NAKAO Shigeki

  Dept. of Micro-Nano Systems Engineering, Nagoya University

• KASAI Takashi

  Dept. of Micro-Nano Systems Engineering, Nagoya University

• Ando Taeko

  Dept. Of Micro System Engineering Nagoya University

• Li Xueping

  Dept. Of Micro System Engineering Nagoya Univ.

• Kasai Takashi

  Dept. Of Micro System Engineering Nagoya Univ.

• Nakao Shigeki

  Dept. Of Micro System Engineering Nagoya Univ.

• Sato Kazuo

  Dept. Of Micro System Engineering Nagoya University

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• 特集論文 Anisotropy of Fracture Strength and Fracture Toughness of Micro-Sized Single-Crystal Silicon (特集:MEMS/NEMS材料特性および信頼性評価)
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