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Advanced Manufacturing Research Institute, AIST | 論文
- Micromachined Thermoelectric Hydrogen Sensor of Double-Membrane Structure
- Resistive Oxygen Sensors Using Cerium Oxide Thin Films Prepared by Metal Organic Chemical Vapor Deposition and Sputtering
- Thermoelectric Properties of RF-Sputtered SiGe Thin Film for Hydrogen Gas Sensor
- Resistive Oxygen Sensors Using Cerium Oxide Thin Films Prepared by Metal Organic Chemical Vapor Deposition and Sputtering
- 水素ガスセンサの応答性能の実際的試験法
- Thermoelectric Properties of RF-Sputtered SiGe Thin Film for Hydrogen Gas Sensor
- Micro-Thermoelectric Hydrogen Sensor of Three Different Membrane Structures