Qian Peng | Department Of Electrical Engineering National University Of Singapore

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概要

• 同名の論文著者
• Department Of Electrical Engineering National University Of Singaporeの論文著者

関連著者

• Qian Peng

  Department Of Electrical Engineering National University Of Singapore

• Lau W

  Lam Res. Corp. California Usa

• Lau Wai

  Department Of Electrical Engineering National University Of Singapore

• Lau Wai

  Centre For Optoelectronics Department Of Electrical Engineering National University Of Singapore

• CHU Paul

  Department of Physics and Materials Science, City University of Hong Kong

• Chu P

  City Univ. Hong Kong Hong Kong Chn

• Chu Paul

  Department Of Physics And Materials Science City University Of Hong Kong

• Sandler N

  Lam Research Corporation Cvd Business Unit

• SANDLER Nathan

  Lam Research Corporation, CVD Business Unit

• MCKINLEY Kevin

  Lam Research Corporation, CVD Business Unit

• KHAW Kee

  Department of Electrical Engineering, National University of Singapore

• SANDLER P.

  Lam Research Corporation, CVD Division

• Khaw Kee

  Department Of Electrical Engineering National University Of Singapore

• Mckinley Kevin

  Lam Research Corporation Cvd Business Unit

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著作論文

• Evidence that N_2O is a Stronger Oxidizing Agent than O_2 for the Post-Deposition Annealing of Ta_2O_5 on Si Capacitors
• A Comparison of Defect States in Tantalum Pentoxide (Ta_2O_5) Films after Rapid Thermal Annealing in O_2 or N_2O by Zero-Bias Thermally Stimulated Current Spectroscopy

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