Itani Toshiro | EUVL Infrastructure Development Center, Inc. (EIDEC), Tsukuba, Ibaraki 305-8569, Japan
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概要
- Itani Toshiroの詳細を見る
- 同名の論文著者
- EUVL Infrastructure Development Center, Inc. (EIDEC), Tsukuba, Ibaraki 305-8569, Japanの論文著者
関連著者
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Itani Toshiro
Euvl Infrastructure Dev. Center Inc. (eidec) Ibaraki Jpn
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Santillan Julius
Euvl Infrastructure Dev. Center Inc. (eidec) Ibaraki Jpn
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Itani Toshiro
EUVL Infrastructure Development Center, Inc. (EIDEC), Tsukuba, Ibaraki 305-8569, Japan
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Santillan Julius
EUVL Infrastructure Development Center, Inc. (EIDEC), Tsukuba, Ibaraki 305-8569, Japan
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KOZAWA Takahiro
The Institute of Scientific and Industrial Research (ISIR), Osaka University
著作論文
- Modeling and Simulation of Acid Diffusion in Chemically Amplified Resists with Polymer-Bound Acid Generator
- Relationship between Defects and Stochastic Effect in Chemically Amplified Resists Used for Extreme Ultraviolet Lithography
- An In situ Analysis of the Dissolution Characteristics of Half Pitch Line and Space Extreme Ultraviolet Lithography Resist Patterns