SUMITA Shigeo | Silicon Technology Center, Sumitomo Sitix Corp.
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概要
Silicon Technology Center, Sumitomo Sitix Corp. | 論文
- Relationship between Grown-in Defects in Czochralski Silicon Crystals
- Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon
- Axial Microscopic Distribution of Grown-in Defects in Czochralski-Grown Silicon Crystals
- Efficiency of Boron Getterimg for Iron Irmpurities in p/p^+ Epitaxial Silicon Wafers
- Microstructure Observation of "Crystal-Originated Particles" on Silicon Wafers