YAMAMOTO Hidekazu | ULSI Laboratory, Mitsubishi Electric Corp.

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• YAMAMOTO Hidekazuの詳細を見る
• 同名の論文著者
• ULSI Laboratory, Mitsubishi Electric Corp.の論文著者

ULSI Laboratory, Mitsubishi Electric Corp. | 論文

• SiO_2 Etching in C_4F_8/O_2 Electron Cyclotron Resonance Plasma
• Analysis of Fluorocarbon Deposition during SiO_2 Etching
• Mechanism of AlCu Film Corrosion
• Test Structure for the Evaluation of Si Substrates (Special Issue on Microelectronic Test Structure)
• Direct Observation of Crystal-Originated Particles on Czochralski-Grown Silicon Wafer Surface and Effect on Gate Oxide Reliability

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