Direct Observation of Crystal-Originated Particles on Czochralski-Grown Silicon Wafer Surface and Effect on Gate Oxide Reliability
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-11-01
著者
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Oka Kazuhiro
Manufacturing Engineering Center Mitsubishi Electric Corp.
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Koyama Toru
Ulsi Laboratory Mitsubishi Electric Corp.
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Izumitani Junko
Ulsi Laboratory Mitsubishi Electric Corp.
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ISHII Hiroyuki
Manufacturing Engineering Center, Mitsubishi Electric Corp.
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SHIRATAKE Shigeru
Manufacturing Technology Division, Mitsubishi Electric Corp.
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MOTONAMI Kaoru
Manufacturing Technology Division, Mitsubishi Electric Corp.
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Motonami Kaoru
Manufacturing Technology Division Mitsubishi Electric Corp.
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Shiratake Shigeru
Manufacturing Technology Division Mitsubishi Electric Corp.
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IZUMITANI Junko
ULSI Laboratory, Mitsubishi Electric Corp.
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KOYAMA Toru
ULSI Laboratory, Mitsubishi Electric Corp.