KANAMORI Masaru | VLSI Development Division, NEC Corporation

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概要

• 同名の論文著者
• VLSI Development Division, NEC Corporationの論文著者

VLSI Development Division, NEC Corporation | 論文

• Uniform Electron Cyclotron Resonance Plasma Generation for Precise ULSI Patterning
• Dependence of Electron Cyclotron Resonance Plasma Characteristics on Introduced Microwave Conditions
• Ion Current Density and Ion Energy Distributions at the Electron Cyclotron Resonance Position in the Electron Cyclotron Resonance Plasma
• Ion Energy Distributions at the Electron Cyclotron Resonance Position in Electron Cyclotron Resonance Plasma
• Dependence of ECR Plasma Etching Characteristics on Sub Magnetic Field and Substrate Position

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