ATSUKI Tsutomu | Central Research Institute, Mitsubishi Materials Corporation

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概要

• 同名の論文著者
• Central Research Institute, Mitsubishi Materials Corporationの論文著者

Central Research Institute, Mitsubishi Materials Corporation | 論文

• Light Scattering by Submicron Particles on Film-Coated Wafers
• Radial Distribution of Oxygen Precipitates in Czochralski Silicon Single Crystals
• Effect of Interstitial Oxygen on Formation of Amorphous SiO_x Layer in Directly Bonded Czoehralski Silicon Wafers
• A Study of Defect Formation Mechamism at Edges of Local Oxidation of Silicon Structure
• Metal Impurity Trapping Effect by Stress at Edges of Local Oxidation of Silicon Structure

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