Miyake Masatoshi | Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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概要
- Miyake Masatoshiの詳細を見る
- 同名の論文著者
- Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japanの論文著者
関連著者
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Miyake Masatoshi
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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IZAWA Masaru
Central Research Laboratory, Hitachi, Ltd.
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Kanekiyo Tadamitsu
Kasado Division Hitachi High-technologies Corporation
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Kanekiyo Tadamitsu
Kasado Division, Hitachi High-Technologies Corp., 794 Toyoi, Kudamatsu, Yamaguchi 744-0002, Japan
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Negishi Nobuyuki
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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Oyama Masatoshi
Kasado Division, Hitachi High-Technologies Corp., 794 Toyoi, Kudamatsu, Yamaguchi 744-0002, Japan
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Negishi Nobuyuki
Central Research Laboratory, Hitachi Ltd., 1-280 Higashikoigakubo, Kokubunji, Tokyo 185-8601, Japan
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Izawa Masaru
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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Izawa Masaru
Central Research Laboratory, Hitachi Ltd., 1-280 Higashikoigakubo, Kokubunji, Tokyo 185-8601, Japan
著作論文
- Effects of Mask and Necking Deformation on Bowing and Twisting in High-Aspect-Ratio Contact Hole Etching
- High-Temperature Annealing by Subatmospheric-Pressure Radio-Frequency Capacitively Coupled Plasma (Special Issue : Dry Process)