Sasaki Koichi | Plasma Nanotechnology Research Center, Nagoya University, Nagoya 464-8603, Japan
スポンサーリンク
概要
関連著者
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Sasaki Koichi
Plasma Nanotechnology Research Center Nagoya University
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Sasaki Koichi
Plasma Nanotechnology Research Center, Nagoya University, Nagoya 464-8603, Japan
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Takada Noriharu
Department Of Electrical Engineering And Computer Science Nagoya University
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Fukaya Kota
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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Tabata Akimori
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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Miwa Kazuhiro
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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Usami Kenji
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
著作論文
- Modification of Fluorinated Al2O3 Surface by Irradiating H2 and O2 Plasmas
- Enhancement of Crystal Growth in Si Thin-Film Deposition by H-Radical-Assisted Magnetron Sputtering