Fukaya Kota | Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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概要
- Fukaya Kotaの詳細を見る
- 同名の論文著者
- Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japanの論文著者
関連著者
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Sasaki Koichi
Plasma Nanotechnology Research Center Nagoya University
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Fukaya Kota
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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Tabata Akimori
Department Of Electrical Engineering Nagoya University
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Sasaki Koichi
Plasma Nanotechnology Research Center, Nagoya University, Nagoya 464-8603, Japan
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Tabata Akimori
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
著作論文
- Enhancement of Crystal Growth in Si Thin-Film Deposition by H-Radical-Assisted Magnetron Sputtering
- Mechanism of Hydrogenated Microcrystalline Si Film Deposition by Magnetron Sputtering Employing a Si Target and H2/Ar Gas Mixture