MUTO Hirotaka | Central Research Laboratory, Mitsubishi Electric Corp.

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• 同名の論文著者
• Central Research Laboratory, Mitsubishi Electric Corp.の論文著者

Central Research Laboratory, Mitsubishi Electric Corp. | 論文

• Microfabrication of Anti-Reflective Chromium Mask by Gas Plasma : A-1: DEVICE TECHNOLOGY (I)
• The Effect of Gas Plasma Irradiation on Transistor
• A New Undercutting Phenomenon in Plasma Etching
• Measurement and Calculation of SiH_2 Radical Density in SiH_4 and Si_2H_6 Plasma for the Deposition of Hydrogenated Amorphous Silicon Thin Films
• Measurement of SiH_2 Densities in an RF-Discharge Silane Plasma Used in the Chemical Vapor Deporsition of Hydrogenated Amorphous Silicon Film

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