JUNG Chan | Semiconductor R&D Samsung Electronics Co., Ltd.
スポンサーリンク
概要
関連著者
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Lee Moon
Samsung Electronics Co. Semiconductor R&d Center Memory Process Development Team
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Jung C
Semiconductor R&d Samsung Electronics Co. Ltd.
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Lee M
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Lee Moon
Semiconductor R&d Center Samsung Electronics Co. Ltd
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JUNG Chan
Semiconductor R&D Center, Samsung Electronics Co.Ltd.
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Lee Moon
Semiconductor R&d Samsung Electronics Co. Ltd.
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JUNG Chan
Semiconductor R&D Samsung Electronics Co., Ltd.
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KOH Young
Semiconductor R&D Center, Samsung Electronics Co.Ltd.
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CHI Kyeong
Semiconductor R&D Samsumg Electronics Co., Ltd.
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Koh Y
Semiconductor R&d Center Samsung Electronics Co.ltd.
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Chi K
Semiconductor R&d Samsumg Electronics Co. Ltd.
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Koh Young
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Chi Kyeong
Semiconductor R&D Samsumg Electronics Co., Ltd.
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KOH Young
Semiconductor R & D Center, Samsung Electronics Co., Ltd
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Kim Woo
Semiconductor Leading Edge Technologies Inc.
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Moon Joo
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kim W
Semiconductor Leading Edge Technol. Inc. Ibaraki Jpn
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YOO Won
Semiconductor R&D Center, Samsung Electronics Co.Ltd.
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NAM Byeong
Semiconductor R&D Center, Samsung Electronics Co.Ltd.
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SHIN Kyung
Semiconductor R&D Center, Samsung Electronics Co.Ltd.
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KANG Chang
Semiconductor R&D Center, SAMSUNG Electronics Co.
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Hahm J
Semiconductor R&d Samsung Electronics Co. Ltd.
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SHIN Kyoung
Semiconductor R&D Samsung Electronics Co., Ltd.
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JUNG Chul
Semiconductor R&D Samsung Electronics Co., Ltd.
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MOON Joo
Semiconductor R&D Samsung Electronics Co., Ltd.
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HAHM Jin
Semiconductor R&D, Samsung Electronics Co., Ltd.
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Yoo Won
Semiconductor R&d Center Samsung Electronics Co.ltd.
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Nam Byeong
Semiconductor R&d Center Samsung Electronics Co.ltd.
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Shin Kyoung
Semiconductor R&d Samsung Electronics Co. Ltd.
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Moon Joo
Semiconductor R&d Samsung Electronics Co. Ltd.
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Kim Woo
Semiconductor R&d Center Samsung Electronics Co.ltd.
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Shin Kyung
Semiconductor R&d Center Samsung Electronics Co.ltd.
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Kang Chang
Semiconductor R&d Samsung Electronics Co. Ltd.
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Moon Joo
Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Korea
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Kang Chang
Semiconductor Manufacturing Technology (SEMATECH), Austin, TX 78741, U.S.A.
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HAHM Jin
Semiconductor R&D, Samsung Electronics Co., Ltd.
著作論文
- Heterogeneous Particle Formation during Low Pressure Etching of Silicon Dioxide
- Enhancement of Mask Selectivity in SiO_2 Etching with a Phase-Controlled Pulsed Inductively Coupled Plasma
- Characteristics of a Stabilized Pulsed Plasma via Suppression of Side-Band Modes