Chi Kyeong | Semiconductor R&D Samsumg Electronics Co., Ltd.

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概要

• 同名の論文著者
• Semiconductor R&D Samsumg Electronics Co., Ltd.の論文著者

関連著者

• Lee Moon

  Samsung Electronics Co. Semiconductor R&d Center Memory Process Development Team

• Jung C

  Semiconductor R&d Samsung Electronics Co. Ltd.

• Lee M

  Samsung Electronics Co. Ltd. Kyungki‐do Kor

• Lee Moon

  Semiconductor R&d Center Samsung Electronics Co. Ltd

• JUNG Chan

  Semiconductor R&D Center, Samsung Electronics Co.Ltd.

• Lee Moon

  Semiconductor R&d Samsung Electronics Co. Ltd.

• CHI Kyeong

  Semiconductor R&D Samsumg Electronics Co., Ltd.

• Chi K

  Semiconductor R&d Samsumg Electronics Co. Ltd.

• JUNG Chan

  Semiconductor R&D Samsung Electronics Co., Ltd.

• Chi Kyeong

  Semiconductor R&D Samsumg Electronics Co., Ltd.

• Moon Joo

  Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.

• KOH Young

  Semiconductor R&D Center, Samsung Electronics Co.Ltd.

• KANG Chang

  Semiconductor R&D Center, SAMSUNG Electronics Co.

• Hahm J

  Semiconductor R&d Samsung Electronics Co. Ltd.

• SHIN Kyoung

  Semiconductor R&D Samsung Electronics Co., Ltd.

• JUNG Chul

  Semiconductor R&D Samsung Electronics Co., Ltd.

• MOON Joo

  Semiconductor R&D Samsung Electronics Co., Ltd.

• HAHM Jin

  Semiconductor R&D, Samsung Electronics Co., Ltd.

• Koh Y

  Semiconductor R&d Center Samsung Electronics Co.ltd.

• Shin Kyoung

  Semiconductor R&d Samsung Electronics Co. Ltd.

• Moon Joo

  Semiconductor R&d Samsung Electronics Co. Ltd.

• Koh Young

  Semiconductor R&d Center Samsung Electronics Co. Ltd.

• Kang Chang

  Semiconductor R&d Samsung Electronics Co. Ltd.

• Moon Joo

  Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Korea

• Kang Chang

  Semiconductor Manufacturing Technology (SEMATECH), Austin, TX 78741, U.S.A.

• HAHM Jin

  Semiconductor R&D, Samsung Electronics Co., Ltd.

• KOH Young

  Semiconductor R & D Center, Samsung Electronics Co., Ltd

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著作論文

• Enhancement of Mask Selectivity in SiO_2 Etching with a Phase-Controlled Pulsed Inductively Coupled Plasma
• Characteristics of a Stabilized Pulsed Plasma via Suppression of Side-Band Modes

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