Moon Joo | Semiconductor R&d Samsung Electronics Co. Ltd.
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概要
関連著者
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Moon Joo
Semiconductor R&d Samsung Electronics Co. Ltd.
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Moon Joo
Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Korea
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Lee Moon
Samsung Electronics Co. Semiconductor R&d Center Memory Process Development Team
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Jung C
Semiconductor R&d Samsung Electronics Co. Ltd.
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Lee M
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Lee Moon
Semiconductor R&d Center Samsung Electronics Co. Ltd
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Moon Joo
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee Sang
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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JUNG Chan
Semiconductor R&D Center, Samsung Electronics Co.Ltd.
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KANG Chang
Semiconductor R&D Center, SAMSUNG Electronics Co.
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Lee Moon
Semiconductor R&d Samsung Electronics Co. Ltd.
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SHIN Kyoung
Semiconductor R&D Samsung Electronics Co., Ltd.
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CHI Kyeong
Semiconductor R&D Samsumg Electronics Co., Ltd.
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JUNG Chul
Semiconductor R&D Samsung Electronics Co., Ltd.
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MOON Joo
Semiconductor R&D Samsung Electronics Co., Ltd.
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Jeon In
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Chi K
Semiconductor R&d Samsumg Electronics Co. Ltd.
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Shin Kyoung
Semiconductor R&d Samsung Electronics Co. Ltd.
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LIM Hyun
Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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CHOI Gil
Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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Kang Chang
Semiconductor R&d Samsung Electronics Co. Ltd.
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Park Young
Semicondactor Materials Laboratory Korea Insrirute Of Science And Technology
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Jeon In
Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Korea
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JUNG Chan
Semiconductor R&D Samsung Electronics Co., Ltd.
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Lee Sang
Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Korea
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Kanag Sang
Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Korea
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Choi Gil
Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Korea
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Kang Sang
Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Korea
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Chi Kyeong
Semiconductor R&D Samsumg Electronics Co., Ltd.
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Lim Hyun
Semiconductor R&D Center, Samsung Electronics Co., Ltd., San #24, Nongseo-Lee, Ki heung-Eup, Yongin City, Kyungki-Do 449-900, Korea
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Kang Chang
Semiconductor Manufacturing Technology (SEMATECH), Austin, TX 78741, U.S.A.
著作論文
- Enhancement of Mask Selectivity in SiO_2 Etching with a Phase-Controlled Pulsed Inductively Coupled Plasma
- Atomic Layer Deposition- and Chemical Vapor Deposition-TiN Top Electrode Optimization for the Reliability of Ta2O5 and Al2O3 Metal Insulator Silicon Capacitor for 0.13 $\mu$m Technology and Beyond