Miyazaki Shuji | Silicon Technology R&d Center Sumitomo Sitix Corporation
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概要
Silicon Technology R&d Center Sumitomo Sitix Corporation | 論文
- Gettering Characteristics of Heavy Metal Impurities in Silicon Wafers with Polysilicon Back Seal and Internal Gettering
- Efficiency of Boron Getterimg for Iron Irmpurities in p/p^+ Epitaxial Silicon Wafers
- Behavior of Defects in Heavily Boron Doped Czochralski Silicon
- Microstructure Observation of "Crystal-Originated Particles" on Silicon Wafers
- Influence of Fe Contamination in Czochralski-Grown Silicon Single Crystals on LSI-Yield Related Crystal Quality Characteristics