Kimura Shigeru | Silicon Systems Research Laboratories Nec Corporation
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概要
関連著者
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Kimura Shigeru
Silicon Systems Research Laboratories Nec Corporation
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Ogura Atsushi
Silicon Systems Research Laboratories Nec Corporation
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TATSUMI Toru
Silicon Systems Research Laboratories, NEC Corporation
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Tatsumi Toru
Silicon Systems Research Laboratories Nec Corporation
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Watanabe Koji
Silicon Systems Research Laboratories, NEC Corporation
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Kimura Shigeru
Silicon Systems Research Laboratories, NEC Corporation
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Ogura Atsushi
Silicon Systems Research Laboratories Nec Corp.
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Watanabe Koji
Silicon Systems Research Laboratories Nec Corporation
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Ogura Atsushi
Silicon System Research Labs., NEC Corp., 1120 Shimokuzawa, Sagamihara 229-1198, Japan
著作論文
- Ultrathin Oxide Film Formation Using Radical Oxygen in an Ultrahigh Vacuum System
- Precise Measurement of Strain Induced by Local Oxidation in Thin Silicon Layers of Silicon-on-Insulator Structures