Hirofuji Yuichi | Semiconductor Reseach Center Matsushita Electric Industrial Co. Ltd.

スポンサーリンク

概要

関連著者

もっと見る

著作論文

Doping of Trench Side-Walls Using an Arsenic Planar-Type Solid-Diffusion Source (S-D Source) and Analysis of Doping Uniformity by Secondary Ion Mass Spectroscoty (SIMS)
Identification of the Particle Source in LSI Manufacturing Process Equipment (Special Issue on Quarter Micron Si Device and Process Technologies)
Low-Energy Double-Ion -Beam Deposition System
PIG-Type Compact Microwave Metal Ion Source

スポンサーリンク