Okada Koichi | Microelectronics Research Laboratories Nec Corporation

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概要

• 同名の論文著者
• Microelectronics Research Laboratories Nec Corporationの論文著者

関連著者

• Okada Koichi

  Microelectronics Research Laboratories Nec Corporation

• Matsui Junji

  Microelectronics Research Laboratories Nec Corporation

• OKADA Koichi

  Microelectronics Research Laboratories, NEC Corporation

• Ohfuji Takeshi

  Vlsi Development Division Nec Corporation

• Fujii Kiyoshi

  Microelectronics Research Laboratories Nec Corporation

• Matsui Junichi

  Microelectronics Research Laboratories Nec Corporation

著作論文

• Effects of Electrons Ejected from the Substrate on PGMA Negative Resist Cross-Linking in X-Ray Lithography
• Polyvinyl Alcohol Film Coating Effect on Novolac-Based Positive Electron Resist Sensitivity in X-Ray Lithography in an Atmospheric Environment
• In-Situ Thermographical Temperature Measurement of Be Windows Irradiated by Synchrotron Radiation : Techniques, Instrumentations and Measurement
• Study of Exposure Atmosphere Effect on PGMA Negative Resist Cross-Linking in X-Ray Lithography Using 1-3 keV Soft X-Ray Sources

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