In-Situ Thermographical Temperature Measurement of Be Windows Irradiated by Synchrotron Radiation : Techniques, Instrumentations and Measurement

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概要

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• Temperature distribution of beryllium windows irradiated by synchrotron radiation emitted from Photon Factory storage ring has been measured in situ using thermography technique. Concerning the Be window for synchrotron radiation, the temperature rise problem, related to causing compressive stress, should be examined in extreme detail to avoid window destruction in the worst case. Two-dimensional temperature distribution was explicitly obtained, which agreed well with theoretical calculation results.

• 社団法人応用物理学会の論文
• 1988-10-20

著者

• Okada Koichi

  Microelectronics Research Laboratories Nec Corporation

• Fujii Kiyoshi

  Microelectronics Research Laboratories Nec Corporation

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• In-Situ Thermographical Temperature Measurement of Be Windows Irradiated by Synchrotron Radiation : Techniques, Instrumentations and Measurement
• Study of Exposure Atmosphere Effect on PGMA Negative Resist Cross-Linking in X-Ray Lithography Using 1-3 keV Soft X-Ray Sources

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