Verhaverbeke Steven | Imec Kapeldreef

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Imec Kapeldreef | 論文

• Critical Parameters for Obtaining Low Particle Densities on a Si Surface in an HF-Last Process
• Degradation and Breakdown of Sub-1nm EOT HfO_2/Metal Gate Stacks
• Degradation and Breakdown of Sub-1nm EOT HfO_2/Metal Gate Stacks
• Reliability Issues in High-k Stacks
• Impact of Organic Contamination on Thin Gate Oxide Quality

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