Verhaverbeke Steven | Imec Kapeldreef
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概要
Imec Kapeldreef | 論文
- Critical Parameters for Obtaining Low Particle Densities on a Si Surface in an HF-Last Process
- Degradation and Breakdown of Sub-1nm EOT HfO_2/Metal Gate Stacks
- Degradation and Breakdown of Sub-1nm EOT HfO_2/Metal Gate Stacks
- Reliability Issues in High-k Stacks
- Impact of Organic Contamination on Thin Gate Oxide Quality