Awaya Nobuyoshi | Ntt Lsi Laboratories
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概要
関連著者
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Awaya Nobuyoshi
Ntt Lsi Laboratories
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ARITA Yoshinobu
NTT LSI Laboratories
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Kobayashi Toshio
NTT LSI Laboratories
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AWAYA Nobuyoshi
Process Development Center, Integrated Circuits Group, SHARP Corporation
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Awaya N
Sharp Corp. Hiroshima Jpn
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Awaya Nobuyoshi
Process Development Center Integrated Circuits Group Sharp Corporation
著作論文
- Self-Aligned Passivation Technology for Copper Interconnection Using Copper-Aluminum Alloy
- Accelerated-Deposition Rate and High-Quality Film Copper Chemical Vapor Deposition Using a Water Vapor Addition to a Hydrogen and Cu(HFA)_2 Reaction System
- Selective Deposition of Silicon Oxide Using a Plasma-Fluorinated Resist Mask : Surfaces, Interfaces and Films
- Plasma-Enhanced Chemical Vapor Deposition of Copper