Awaya Nobuyoshi | Ntt Lsi Laboratories

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概要

• Awaya Nobuyoshiの詳細を見る
• 同名の論文著者
• Ntt Lsi Laboratoriesの論文著者

関連著者

• Awaya Nobuyoshi

  Ntt Lsi Laboratories

• ARITA Yoshinobu

  NTT LSI Laboratories

• Kobayashi Toshio

  NTT LSI Laboratories

• AWAYA Nobuyoshi

  Process Development Center, Integrated Circuits Group, SHARP Corporation

• Awaya N

  Sharp Corp. Hiroshima Jpn

• Awaya Nobuyoshi

  Process Development Center Integrated Circuits Group Sharp Corporation

著作論文

• Self-Aligned Passivation Technology for Copper Interconnection Using Copper-Aluminum Alloy
• Accelerated-Deposition Rate and High-Quality Film Copper Chemical Vapor Deposition Using a Water Vapor Addition to a Hydrogen and Cu(HFA)_2 Reaction System
• Selective Deposition of Silicon Oxide Using a Plasma-Fluorinated Resist Mask : Surfaces, Interfaces and Films
• Plasma-Enhanced Chemical Vapor Deposition of Copper

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