SAITO S. | ULSI Device Dev. Labs., NEC Corp.
スポンサーリンク
概要
関連著者
-
SAITO S.
ULSI Device Dev. Labs., NEC Corp.
-
Eaglesham D.
Lucent Technologies
-
HAMADA K.
ULSI Device Dev. Labs., NEC Corp.
-
HAYASHI T.
ULSI Device Dev. Labs., NEC Corp.
-
POATE J.
Lucent Technologies
-
Mineji A.
Ulsi Device Development Division Nec Electron Devices Nec Corporation
-
Mineji A.
Ulsi Device Development Laboratories Nec Corporation
-
NISHIO N.
ULSI Device Development Division, NEC Electron Devices, NEC Corporation
-
KUNIMUNE Y.
ULSI Device Development Laboratories, NEC Corporation
-
KODAMA N.
ULSI Device Development Laboratories, NEC Corporation
-
KIKUCHI H.
ULSI Device Development Laboratories, NEC Corporation
-
TODA T.
ULSI Device Development Laboratories, NEC Corporation
-
SHISHIGUCHI S.
ULSI Device Development Laboratories, NEC Corporation
-
Shishiguchi S.
Ulsi Device Development Laboratories Nec Corporation
-
Kunimune Y.
Ulsi Device Development Laboratories Nec Corporation
著作論文
- High Energy B Implantation for Fe Gettering ; Evaluation of 7.5nm Thick Gate Oxide Reliability
- Lateral Diffusion Distance Measurement for 40-80nm Junctions by Etching/TEM-EELS Method