Toriumi Akira | Mirai Project Advanced Semiconductor Research Center (asrc)
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概要
Mirai Project Advanced Semiconductor Research Center (asrc) | 論文
- Thermal Stability of a Thin HfO_2/Ultrathin SiO_2/Si Structure : Interfacial Si Oxidation and Silicidation
- Thermal Stability of a Thin HfO2/Ultrathin SiO2/Si Structure: Interfacial Si Oxidation and Silicidation
- Plasma-Enhanced Co-Polymerization of Organo-siloxane and Hydrocarbon for Low-$k$/Cu Interconnects
- Effects of Surfactants on the Properties of Ordered Periodic Porous Silica Films
- Study on Oxynitride Buffer Layers in HfO2 Metal–Insulator–Semiconductor Structures for Improving Metal–Insulator–Semiconductor Field-Effect Transistor Performance