Ohkawara Go | Department Of Functional Materials Science Faculty Of Engineering Saitama University
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概要
関連著者
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SHIRAI Hajime
Department of Functional Materials Science, Faculty of Engineering
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UEYAMA Hiroyuki
Nihon Koshuha Co., Ltd.
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Shirai Hajime
Department Of Functional Materials And Science Faculty Of Engineering Saitama University
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Ueyama H
Nihon Koshuha Co. Ltd.
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Yoshino Koichi
Department of Epidemiology and Public Health, Tokyo Dental College
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Yoshino Koichi
Department Of Epidemiology And Public Health Tokyo Dental College
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OHKAWARA Go
Department of Functional Materials Science, Faculty of Engineering, Saitama University
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Ohkawara Go
Department Of Functional Materials Science Faculty Of Engineering Saitama University
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Ueyama Hiroyuki
Nihon Koshuha Co. Ltd.
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Yoshino Katsumi
The Department Of Electrical Engineering Osaka University
著作論文
- Microcrystalline Silicon Film Growth Using a High-Density Microwave Plasma of SiH_4-and-D_2 Mixture
- Novel High Density Microwave Plasma Utilizing an Internal Spoke Antenna for Fast Deposition of Microcrystalline Silicon Films : Nuclear Science, Plasmas, Electric Dischanges