Sekiguchi Mitsuru | Semiconductor Research Center Matsushita Electric Ind.co.ltd.
スポンサーリンク
概要
関連著者
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Fujii T
Institute Of Industrial Science University Of Tokyo
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Fujii T
Tohoku Univ. Sendai Jpn
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Yamanaka Michinari
Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.
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Yamanaka M
Electron Devices Division Electrotechnical Laboratory
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Sekiguchi Mitsuru
Semiconductor Research Center Matsushita Electric Ind.co.ltd.
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Sekiguchi Mitsuru
Semiconductor Research Center Matsushita Electric Ind. Co. Ltd.
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Yamanaka Michinari
Semiconductor Research Center, Matsushita Electric Ind. Co. Ltd.,
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Fukumoto Masanori
Semiconductor Research Center Matsushita Electric Ind. Co. Ltd.
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Sekiguchi Mitsuru
Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.
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Fujii Toyokazu
Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.
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FUJII Toyokazu
Kyoto Research Laboratory, Matsushita Electronics Co.
著作論文
- A Novel Al/TiN/CVD-W Structure to Eliminate Resistance Anomaly in Deep Submicron Al/CVD-W Interconnects
- Suppression of Resistance Increase in Al/W Interconnects by N_2 Plasma Treatment