FUJII Toyokazu | Kyoto Research Laboratory, Matsushita Electronics Co.
スポンサーリンク
概要
関連著者
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FUJII Toyokazu
Kyoto Research Laboratory, Matsushita Electronics Co.
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Sekiguchi Mitsuru
Semiconductor Research Center Matsushita Electric Ind. Co. Ltd.
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Yamanaka Michinari
Semiconductor Research Center, Matsushita Electric Ind. Co. Ltd.,
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Fujii T
Institute Of Industrial Science University Of Tokyo
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Fujii T
Tohoku Univ. Sendai Jpn
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Yamanaka Michinari
Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.
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Yamanaka M
Electron Devices Division Electrotechnical Laboratory
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Sekiguchi Mitsuru
Semiconductor Research Center Matsushita Electric Ind.co.ltd.
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Sekiguchi Mitsuru
Semiconductor Research Center, Matsushita Electric Ind. Co. Ltd.,
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Fujii Toyokazu
Kyoto Research Laboratory, Matsushita Electronics Co. Ltd.,
著作論文
- Suppression of Resistance Increase in Al/W Interconnects by N_2 Plasma Treatment
- Suppression of Resistance Increase in Annealed Al/W Interconnects by Capacitively Coupled Plasma Nitridation on W Surface