AKETA Masatoshi | Department of Precision Science and Technology, Graduate School of Engineering, Osaka University

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概要

関連著者

KAKIUCHI Hiroaki
Department of Precision Science and Technology, Osaka University
YASUTAKE Kiyoshi
Department of Precision Engineering, Faculty of Engineering, Osaka University
Yasutake Kiyoshi
Graduate School Of Engineering Osaka University
Kakiuchi Hiroaki
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
OHMI Hiromasa
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
NAKAMURA Ryota
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
AKETA Masatoshi
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University

著作論文

Structural Characterization of Polycrystalline 3C-SiC Films Prepared at High Rates by Atmospheric Pressure Plasma Chemical Vapor Deposition Using Monomethylsilane

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