Magane Mitsuo | Department Of Electronics Faculty Of Engineering Nagoya University
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概要
関連著者
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YAMADA Chikashi
Institute for Laser Science, The University of Electro-Communications
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GOTO Toshio
Department of Quantum Engineering, Nagoya University
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HIROTA EIZI
Institute for Molecular Science
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ITABASHI Naoshi
Central Research Laboratory, Hitachi, Ltd.
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Itabashi N
Plasma Technology Laboratory Association Of Super-advanced Electronics Technologies(aset)
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MAGANE Mitsuo
Department of Electronics, Faculty of Engineering, Nagoya University
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ITABASHI Naoshi
Department of Electronics, Faculty of Engineering, Nagoya University
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NISHIWAKI Nobuki
Department of Electronics, Faculty of Engineering, Nagoya University
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Magane Mitsuo
Department Of Electronics Faculty Of Engineering Nagoya University
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Nishiwaki Nobuki
Department Of Electronics Faculty Of Engineering Nagoya University
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Goto Toshio
Department Of Electronics Faculty Of Engineering Nagoya University
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Hirota E
Guraduate Univ. Advanced Studies Yokohama
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Yamada Chikashi
Institute For Molecular Science
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Goto Toshio
Department Of Electronic Mechanical Engineering Nagoya University
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GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
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MATSUDA Akihisa
Electrotechnical Laboratory
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Matsuda A
Department Of Electrical And Electronic Engineering Faculty Of Engineering Toyama University
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Naito Susumu
Department Of Electronics Faculty Of Engineering Nagoya University
著作論文
- Measurements of the CF Radical in DC Pulsed CF_4/H_2 Discharge Plasma Using Infrared Diode Laser Absorption Spectroscopy
- Spatial Distribution of SiH_3 Radicals in RF Silane Plasma
- SiH_3 Radical Density in Pulsed Silane Plasma