NOGUCHI Junji | Micro Device Division, Hitachi, Ltd.
スポンサーリンク
概要
関連著者
-
NOGUCHI Junji
Micro Device Division, Hitachi, Ltd.
-
武田 健一
日立製作所 中央研究所
-
Takeda Ken-ichi
Central Research Laboratory Hitachi Ltd.
-
OHASHI Naofumi
Semiconductor Leading Edge Technologies, Inc.
-
YAMAGUCHI Hizuru
Renesas Technology Corp.
-
Ohashi Naofumi
Device Development Center Hitachi Ltd.
-
Noguchi Junji
Device Development Center Hitachi Ltd.
-
Ohashi Naofumi
Semiconductor Leading Edge Technologies Inc.
-
Doi Toshiro
Department Of Mechanical Engineering Graduate School Kyushu University
-
Kurokawa Syuhei
Department Of Intelligent Machinery And Systems Kyushu University
-
Yamada Yohei
Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan
-
Konishi Nobuhiro
Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan
-
Jimbo Tomoko
Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan
-
Doi Toshiro
Department of Education, Saitama University, 255 Shimo-Okubo, Sakura-ku, Saitama 338-8570, Japan
-
Noguchi Junji
Micro Device Division, Hitachi, Ltd., 6-16-3 Shinmachi, Ome, Tokyo 198-8512, Japan
著作論文
- Dependence of Time-Dependent Dielectric Breakdown Lifetime on NH_3-Plasma Treatment in Cu Interconnects
- Study on Factors in Time-Dependent Dielectric Breakdown Degradation of Cu/Low-$k$ Integration Related to Cu Chemical–Mechanical Polishing