Kihara Naoko | Materials And Devices Research Laboratories Research And Development Center Toshiba Corporation
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概要
- 同名の論文著者
- Materials And Devices Research Laboratories Research And Development Center Toshiba Corporationの論文著者
関連著者
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KIHARA Naoko
Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation
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Kihara Naoko
Materials And Devices Research Laboratories Research And Development Center Toshiba Corporation
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Kihara Naoko
Materials & Devices Laboratory, R&D center, Toshiba Corporation
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NAKASE Makoto
Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation
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Sato S
Ulsi Process Engineering Laboratory Microelectronics Engineering Laboratory Toshiba Corporation
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Kihara N
Sony Corp. Tokyo Jpn
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SAITO Satoshi
Materials & Devices Laboratory, R&D center, Toshiba Corporation
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Nakase M
Materials And Devices Research Laboratories Research And Development Center Toshiba Corporation
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Saito Shozo
Shizuoka Industrial Research Institute
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NAKASUGI Tetsuro
ULSI Process Engineering Laboratory, Microelectronics Engineering Laboratory, TOSHIBA Corporation
著作論文
- Dissolution Inhibitors for 193-nm Chemically Amplified Resists
- Thermal Decomposition of Dissolution Inhibitor in Chemically Amplified Resist during Prebake Process
- Charge-reducing Effect of Chemically Amplified Resist in Electron-Beam Lithography
- Optimization of a High-Performance Chemically Amplified Positive Resist for Electron-Beam Lithography