Sim Hyun | Semiconductor Devices Laboratory Korea Institute Of Science And Technology
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概要
関連著者
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Kim Yong
Semiconductor Devices Laboratory Korea Institute Of Science And Technology
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Sim Hyun
Semiconductor Devices Laboratory Korea Institute Of Science And Technology
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Kim Seong-il
Semiconductor Devices Laboratory Korea Institute Of Science And Technology
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Sim H
Korea Inst. Of Sci. And Technol. Seoul Kor
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Park Jong-wan
Division Of Materials Science And Engineering Hanyang University
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SIM Hyun
Semiconductor Materials and Devices Lab., Korea Institute of Science and Technology
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Lee Seoghyeong
Division Of Materials Science And Engineering Hanyang University
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Jeon Hyeongtag
Division Of Materials Science & Engineering Hanyang University
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Kim Dong
Semiconductor Lab, Samsung Advanced Institute of Technology, Samsung Electronics, Gyeonggi-do 446-712, Korea
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Kim Yong
Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology
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Kim Y
Electronics And Telecommunications Res. Inst. (etri) Daejeon Kor
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Park J‐w
Pusan National Univ. Busan Kor
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Kim Y
Semiconductor Materials And Devices Laboratory Korea Institute Of Science And Technology
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Kim Seong-il
Semiconductor Materials Laboratory Korea Institute Of Science And Technology
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Kim Y‐h
Semiconductor Devices Laboratory Korea Institute Of Science And Technology
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Kim D
Semiconductor Materials Laboratory Korea Institute Of Science And Technology
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Kim Dong
Semiconductor Materials Research Center Korea Institute Of Science And Technology
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JEON Hyeongtag
Division of Materials Science and Engineering, Hanyang University
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LEE Seoghyeong
Division of Materials Science and Engineering, Hanyang University
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Kim S
Semiconductor Devices Laboratory Korea Institute Of Science And Technology
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Jeon Hyeongtag
Division Of Materials Science And Engineering Hanyang University
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KlM Yong
Semiconductor Materials Laboratory, Korea Institute of Science and Technology
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Kim Dong
Semiconductor Materials Laboratory Korea Institute Of Science And Technology
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Kim Yong
Korea Institute Of Science And Technology
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Park J‐w
Department Of Pharmacology Seoul National University College Of Medicine
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Sim Hyun
Semiconductor Materials Laboratory Korea Institute Of Science And Technology
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Klm Yong
Semiconductor Materials Laboratory Korea Institute Of Science And Technology
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Kim Seong-Il
Semiconductor Materials and Devices Lab., Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, Korea
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Sim Hyun
Semiconductor Materials and Devices Lab., Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, Korea
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Park Jong-Wan
Division of Materials Science and Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-ku, Seoul 133-791, Korea
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Sim Hyun
Semiconductor Materials Laboratory, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul 136-791, Korea
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Lee Seoghyeong
Division of Materials Science and Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-ku, Seoul 133-791, Korea
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Kim Dong
Semiconductor Materials Laboratory, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul 136-791, Korea
著作論文
- Improvement of the Reliability of a Cu/W-N/SiOF Multilevel Interconnect by Inserting Plasma Enhanced Chemical Vapor Deposited W-N Thin Film
- Effects of NH_3 Plasma Treatment on Methyl Silsequioxane for Copper Multi-Level Interconnect(Semiconductors)
- A New Pulse Plasma Enhanced Atomic Layer Deposition of Tungsten Nitride Diffusion Barrier for Copper Interconnect
- Improvement of the Reliability of a Cu/W–N/SiOF Multilevel Interconnect by Inserting Plasma Enhanced Chemical Vapor Deposited W–N Thin Film