MASUBUCHI Tomoaki | Canon Sales Co., Inc.

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概要

• 同名の論文著者
• Canon Sales Co., Inc.の論文著者

関連著者

• Ohdaira Toshiyuki

  National Inst. Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn

• Ohdaira Toshiyuki

  National Institute Of Advanced Industrial Science And Technology

• Suzuki R

  National Institute Of Advanced Industrial Science And Technology

• Suzuki Ryoichi

  National Institute Of Advanced Industrial Science And Technology

• SHIOYA Yoshimi

  Semiconductor Process Laboratory Co., Ltd.

• MAEDA Kazuo

  Semiconductor Process Laboratory Co., Ltd.

• ISHIMARU Tomomi

  Canon Sales Co., Inc.

• IKAKURA Hiroshi

  Canon Sales Co., Inc.

• MASUBUCHI Tomoaki

  Canon Sales Co., Inc.

• Ohshima Takeshi

  Japan Atomic Energy Research Institute (jaeri)

• Ohdaira Toshiyuki

  National Institute Of Advanced Industrial Science And Technology (aist)

• Shioya Yoshimi

  Semiconductor Process Laboratory Co. Ltd.

• Ohgaki Takeshi

  National Inst. For Materials Sci.

• Ohshima T

  Japan Atomic Energy Res. Inst. Takasaki Jpn

• Ikakura Hiroshi

  Canon Sales Co. Inc.

• Ishimaru Tomomi

  Canon Sales Co. Inc.

• Masubuchi Tomoaki

  Canon Sales Co. Inc.

• Maeda Kazuo

  Semiconductor Division Fujitsu Limited

• Maeda Kazuo

  Semiconductor Process Laboratory Co. Ltd.

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著作論文

• Properties of Low-k Cu Barrier SiOCNH Film Deposited by Plasma-Enhanced Chemical Vapor Deposition using Hexamethyldisiloxane and Ammonia Gases

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