JUN Keeyoung | Department of Materials Engineering, School of Engineering, University of Tokyo

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概要

• 同名の論文著者
• Department of Materials Engineering, School of Engineering, University of Tokyoの論文著者

関連著者

• SHIMOGAKI Yukihiro

  Department of Materials Engineering, The University of Tokyo

• JUN Keeyoung

  Department of Materials Engineering, School of Engineering, University of Tokyo

• 霜垣 幸浩

  Univ. Of Tokyo Tokyo Jpn

• Jun Keeyoung

  Department Of Materials Engineering School Of Engineering University Of Tokyo

• Jun Keeyoung

  Department Of Materials Engineering School Of Engineering Univ. Of Tokyo

• IM Ik-Tae

  Dept. of Automotive Engineering, Iksan National College

著作論文

• Effect of Partial Pressure of TiCl_4 and NH_3 on Chemical Vapor Deposition Titanium Nitride (CVD-TiN) Film Cl Content and Electrical Resistivity
• Improvement of TiN Flow Modulation Chemical Vapor Deposition from TiCl_4 and NH_3 by Introducing Ar Purge Time

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