Jun Keeyoung | Department Of Materials Engineering School Of Engineering University Of Tokyo

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概要

• 同名の論文著者
• Department Of Materials Engineering School Of Engineering University Of Tokyoの論文著者

関連著者

• 霜垣 幸浩

  Univ. Of Tokyo Tokyo Jpn

• SHIMOGAKI Yukihiro

  Department of Materials Engineering, The University of Tokyo

• JUN Keeyoung

  Department of Materials Engineering, School of Engineering, University of Tokyo

• Jun Keeyoung

  Department Of Materials Engineering School Of Engineering University Of Tokyo

著作論文

• Effect of Partial Pressure of TiCl_4 and NH_3 on Chemical Vapor Deposition Titanium Nitride (CVD-TiN) Film Cl Content and Electrical Resistivity

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