ISHIKAWA Yasushi | Institute of Fluid Science, Tohoku University
スポンサーリンク
概要
関連著者
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ISHIKAWA Yasushi
Institute of Fluid Science, Tohoku University
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SAMUKAWA Seiji
Institute of Fluid Science, Tohoku University
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Ishikawa Yasushi
Institute Of Fluid Science Tohoku University
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Samukawa S
Tohoku Univ. Sendai Jpn
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Samukawa Seiji
Institute Of Fluid Science Tohoku University
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Samukawa Seiji
Process Development Department Vlsi Development Division Nec Corporation
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Samukawa Seiji
Vlsi Development Div. Nec Corporation
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Okigawa Mitsuru
Sanyo Electric Co. Ltd.
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Kato Yuji
Institute Of Fluid Science Tohoku University
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ICHIHASHI Yoshinari
Institute of Fluid Science, Tohoku University
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SHIMIZU Ryu
Sanyo Electric Co., Ltd.
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Shimizu Ryu
Sanyo Electric Co. Ltd.
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Ichihashi Yoshinari
Institute Of Fluid Science Tohoku University
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OKIGAWA Mitsuru
Institute of Fluid Science, Tohoku University
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Mizubayashi Hiroshi
Institute Of Materials Science University Of Tsukuba
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Kumagai Shinya
Institute Of Fluid Science Tohoku University
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MIZUHARA Hideki
Sanyo Electric Co., Ltd.
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ISHIKAWA Yasushi
Intelligent Nano-Process laboratory, Institute of Fluid Science, Tohoku University
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KATOH Yuji
Intelligent Nano-Process laboratory, Institute of Fluid Science, Tohoku University
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OKIGAWA Mitsuru
Intelligent Nano-Process laboratory, Institute of Fluid Science, Tohoku University
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SAMUKAWA Seiji
Intelligent Nano-Process laboratory, Institute of Fluid Science, Tohoku University
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Tanimoto Hisanori
Institute Of Materials Science University Of Tsukuba
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Mizuhara Hideki
Sanyo Electric Co. Ltd.
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Ishikawa Yasushi
Institute Of Materials Science University Of Tsukuba
著作論文
- Plasma-Radiation-Induced Interface States in Metal-Nitride-Oxide-Silicon Structure of Charge Coupled Device Image Sensor and Their Reduction Using Pulse-Time-Modulated Plasma
- Effects of Thermal Annealing for Restoration of UV Irradiation Damage during Plasma Etching Processes
- Effects of CF_3I Plasma for Reducing UV Irradiation Damage in Dielectric Film Etching Processes
- Control of UV Radiation Damages for the High Sensitive CCD Image Sensor
- On-Wafer Monitoring of Vacuum-Ultraviolet Radiation Damage in High-Density Plasma Processes
- Hydrogen Internal Friction Peak in Amorphous Zr-Cu-Al-Si Alloys