Matsuoka Kouji | Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.
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概要
Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd. | 論文
- A 16-bit Digital Signal Processor with Specially Arranged Multiply-Accumulator for Low Power Consumption
- A Novel Al/TiN/CVD-W Structure to Eliminate Resistance Anomaly in Deep Submicron Al/CVD-W Interconnects
- Radical Behavior in Inductively Coupled Fluorocarbon Plasma for SiO2 Etching
- RIE-Lag Reduction by NH_3 Addition in Aluminum Alloy Etching under BCl_3/Cl_2 Chemistry
- Suppression of Resistance Increase in Al/W Interconnects by N_2 Plasma Treatment