YATA Michio | Dept. of Physical Electronics, Tokyo Institute of Technology

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• 同名の論文著者
• Dept. of Physical Electronics, Tokyo Institute of Technologyの論文著者

Dept. of Physical Electronics, Tokyo Institute of Technology | 論文

• Hydrogen-Radical Annealing of Chemical Vapor-Deposited Amorphous Silicon Films
• A Fluorinated Organic-Silica Film with Extremely Low Dielectric-Constant
• Impact of Latent Image Quality on Line Edge Roughness in Electron Beam Lithography
• Impact of Latent Image Quality on Line Edge Roughness in Electron Beam Lithography
• Characteristic Grooves on GaAs by Anodization

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