Chemical Reaction During Pt Etching with SF_6/Ar and Cl_2/Ar Plasma Chemistries
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-04-15
著者
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Kim Sang
Division of Gynecologic Oncology, Department of Obstetrics and Gynecology, Yonsei University College
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Ahn Jinho
Division Of Materials Science And Engineering Hanyang University
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Hwang Jae
Division Of Materials Science And Engineering Hanyang University
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Ju Sup-youl
Division Of Materials Science And Engineering Hanyang University
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Kim Sang
Division Of Materials Science And Engineering Hanyang University
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