Deprotonation of Poly(4-hydroxystyrene) Intermediates : Pulse Radiolysis Study of Extreme Ultraviolet and Electron Beam Resist (Special Issue : Microprocesses and Nanotechnology)
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Sumiyoshi Takashi
Division Of Quantum Energy Engineering Graduate School Of Engineering Hokkaido University
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FUJIYOSHI Ryoko
Division of Quantum Energy Engineering, Graduate School of Engineering, Hokkaido University
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Tagawa Seiichi
CREST/JST, Kawaguchi, Saitama 332-0012, Japan
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Matsuda Ryo
Division of Quantum Science and Engineering, Faculty/Graduate School of Engineering, Hokkaido University, Sapporo 060-8628, Japan
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Yamamoto Hiroki
CREST/JST, Kawaguchi, Saitama 332-0012, Japan
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Okamoto Kazumasa
Division of Quantum Science and Engineering, Faculty/Graduate School of Engineering, Hokkaido University, Sapporo 060-8628, Japan
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Kozawa Takahiro
CREST/JST, Kawaguchi, Saitama 332-0012, Japan
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Fujiyoshi Ryoko
Division of Quantum Science and Engineering, Faculty/Graduate School of Engineering, Hokkaido University, Sapporo 060-8628, Japan
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- Deprotonation of Poly(4-hydroxystyrene) Intermediates: Pulse Radiolysis Study of Extreme Ultraviolet and Electron Beam Resist
- Deprotonation of Poly(4-hydroxystyrene) Intermediates : Pulse Radiolysis Study of Extreme Ultraviolet and Electron Beam Resist (Special Issue : Microprocesses and Nanotechnology)