Difference of spur distribution in chemically amplified resists upon exposure to electron beam and extreme ultraviolet radiation
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Saeki Akinori
The Institute Of Scientific And Industrial Research Osaka University
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Saeki Akinori
Osaka Univ. Osaka Jpn
関連論文
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- Correlation between $C_{37}$ Parameters and Acid Yields in Chemically Amplified Resists upon Exposure to 75 keV Electron Beam
- Difference of Spur Distribution in Chemically Amplified Resists upon Exposure to Electron Beam and Extreme Ultraviolet Radiation